Semiconductor

Increased cleaning, lubricity & tool life

SIO nanobubbles unique characteristics provide superior cleaning properties while reducing chipping, extending tool life and improving overall production quality.

Benefits

Superior Cleaning

Nanobubbles penetrate deep into small crevices to dislodge and remove contaminants and sludge particles from the surface of the wafers.

Less Chipping

Nanobubbles reduces mechanical stress to minimize damage to chips and improves the overall yield and quality of the dicing process.

Improved Heat Transfer

Nanobubbles increase heat transfer properties. Cooler tools for extended life, and cooler workpiece for more precise dicing.

Increased Lubricity

Nanobubbles reduce surface tension of cleaning solutions for increased tool life and decrease damage to chips.

Increased Zeta Potential

Nanobubbles Increased zeta-potential attracts and collects opposite charged sludge particles and better penetrates boundary layers on opposite charged surfaces.

Enhanced Chip Evacuation

Greater Penetration

The small size of nanobubbles allows them to penetrate into small cracks, crevices, and pores that larger bubbles or conventional cleaning methods might miss. This ensures thorough cleaning and removal of stubborn residues.

Surfactant Action

Nanobubbles have a strong negative surface charge that enables them to absorb positively charged dirt and oily contaminants floating in the water.